Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications
نویسندگان
چکیده
منابع مشابه
Modelling and Optimisation of a Spring-Supported Diaphragm Capacitive MEMS Microphone
Audio applications such as mobile communication and hearing aid devices demand a small size but high performance, stable and low cost microphone to reproduce a high quality sound. Capacitive microphone can be designed to fulfill such requirements with some trade-offs between sensitivity, operating frequency range, and noise level mainly due to the effect of device structure dimensions and visco...
متن کاملAccurate Determination of the Pull-in Voltage for MEMS Capacitive Microphone with Clamped Square Diaphragm
Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...
متن کاملFabrication and Characterization of a New MEMS Capacitive Microphone using Perforated Diaphragm
In this paper, a novel single-chip MEMS capacitive microphone is presented. The novelties of this method relies on the moveable aluminum (Al) diaphragm positioned over the backplate electrode, where the diaphragm includes a plurality of holes to allow the air in the gap between the electrode and diaphragm to escape and thus reduce acoustical damping in the microphone. Spin-on-glass (SOG) was us...
متن کاملThe Effect of Corrugations on Mechanical Sensitivity of Diaphragm for MEMS Capacitive Microphone
In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that ...
متن کاملMEMS Capacitive Microphone with Dual - Anchored Membrane †
In this paper, we proposed a MEMS capacitive microphone with a dual-anchored membrane. The proposed dual anchor could minimize the deviation of operating characteristics of the membrane according to the fabrication process variation. The membrane is connected and fixed to the back plate insulating silicon nitride structures instead to the sacrificial bottom insulating oxide layer so that its ef...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sensors
سال: 2018
ISSN: 1424-8220
DOI: 10.3390/s18103545